发明名称 CUTTING SYSTEM
摘要 <p>PURPOSE:To prevent generation of mistake on the transmission of information between steps by storing the data necessary for cutting a workpiece through a CPU at every lot or every sheet, inputting the information processed by a worker to a storing means, and cutting the necessary data obtained after communication with the CPU. CONSTITUTION:The data necessary for cutting a workpiece W, data of each cutting unit 1 to 4, A to D, the results of cutting, alignment conditions and the like are stored in the storing means 5a of a CPU5. The respective cutting units 1 to 4, A to D receive the data necessary for respective cutting operations from the data stored in the storing means 5a after communication with the CPU5, and with the information the cutting operations are carried out. During the time between the first and second step inspections by a measuring unit 7 as well as polishing by a polisher 6 are performed. These data of cutting processing and polishing, and the measurement results are respectively input to the storing means 5a.</p>
申请公布号 JPH06170702(A) 申请公布日期 1994.06.21
申请号 JP19920343632 申请日期 1992.12.01
申请人 DISCO ABRASIVE SYST LTD 发明人 ARAI KAZUNAO;UCHIDA FUMIO;TAKAHASHI TOSHIAKI
分类号 B23Q41/00;B23Q41/08;G05B19/418;H01L21/301;H01L21/78;(IPC1-7):B23Q41/00 主分类号 B23Q41/00
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