| 摘要 |
<p>PURPOSE:To prevent a temperature change from being generated in an attracted object due to a change of attracting force even in the case of changing the attracting force acting in the attracted object attracted to be held to an attracting surface, in a temperature sensor-built in electrostatic chuck device constituted by burying an attracting electrode and a heater in the vicinity of the attracting surface in an insulator. CONSTITUTION:In a device constitution, in addition to a temperature sensor 4, a pressure sensor 10 capable of measuring attracting force is built in a device. In the case of operation, attracting force in the initial condition of operation is stored as standard attracting force in a memory 12, and the attracting force is measured one after another during the time from starting to ending processing an attracted object (substrate) 15, to control a heater power supply 8 by correcting an output signal of the temperature sensor II with a temperature change amount by a change amount from the standard attracting force or to control an attracting power supply 9 with a change amount from the standard attracting force, so that the attracting force is returned to the original.</p> |
