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发明名称
SPINNER DEVICE
摘要
申请公布号
JPH06170316(A)
申请公布日期
1994.06.21
申请号
JP19920349873
申请日期
1992.12.02
申请人
ORIGIN ELECTRIC CO LTD
发明人
ANDO KESAO;KASHIWAGI TOSHIO;KOTOYORI MASAHIKO;YAMAGUCHI KATSUMI
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30;(IPC1-7):B05C11/08
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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