Method of rapid sample handling for laser processing

摘要

A method of rapid sample handling in a production environment for laser processing of individual microelectronic die is particularly suited for handling partially fabricated die and die which are susceptible to mechanical and electrostatic damage, such as backside illuminated CCDs requiring backside dopant activation and laser texturing of sidewalls. Securing a die within a modified sample holder provides for electrostatic and mechanical protection during laser processing. Placing the modified die holder onto a feeder base portion that engages a "tractor-feed" translation subsystem protects the die during a translation and positioning of the die below and aligned with a laser processing structure. A window holder is engaged with the die holder to seal the die in a processing chamber and to assure an appropriate pressurizing with a gaseous ambient for a desired processing. Illuminating, repetitively if desired, the die in the chamber with a laser beam of appropriate size, laser fluence, repetition rate and number of pulses processes the die. Next, the processed die is translated from beneath laser processing structure while the next die is correctly positioned for processing.