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经营范围
发明名称
Röntgenbelichtungssystem.
摘要
申请公布号
DE68915239(D1)
申请公布日期
1994.06.16
申请号
DE19896015239
申请日期
1989.10.04
申请人
CANON K.K., TOKIO/TOKYO
发明人
IWAMOTO, KAZUNORI, ATSUGI-SHI KANAGAWA-KEN;UZAWA, SHUNICHI, TOKYO;KARIYA, TAKAO, HINO-SHI TOKYO;EBINUMA, RYUICHI, KAWASAKI-SHI KANAGAWA-KEN
分类号
G03F9/00;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03F7/20
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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