| 摘要 |
An insulating body (13), a cathode supporter (2) for supporting a target (3), a magnetic field generator (14), a water-cooling tube (15), and a shielding electrode (16) having "?" cross-section shape and surrounding the cathode supporter (12), are arranged in the cask (12) located in the vacuum chamber (1). The voltage power source (A) of arc generation and the voltage power source (B) of the shielding electrode are arranged outside (B) of the shielding electrode are arranged outside the chamber (1). The negative pole of the voltage power source (A) is connected to the cathode supporter (2) and the water-cooling tube (15), and the positive pole is connected to the cask. The negative pole of the voltage power source (B) is connected to the vacuum chamber (1), and the positive pole is connected to the shielding electrod (16).
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