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发明名称
Verfahren und Vorrichtung zur Erzeugung von Ionenstrahlen mit grossflächigem Strahlquerschnitt.
摘要
申请公布号
DE59005653(D1)
申请公布日期
1994.06.16
申请号
DE19905005653
申请日期
1990.01.02
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN
发明人
JANES, JOACHIM, DR., D-1000 BERLIN 42
分类号
H01J27/10;H01J37/08;(IPC1-7):H01J27/10
主分类号
H01J27/10
代理机构
代理人
主权项
地址
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