In an aerostatic micro bearing intended to support or guide moving parts, one of the bearing surfaces is formed by monocrystalline silicon in which nozzle holes (2) for the feeding in of the air are formed by anisotropic etching (Figure 1). <IMAGE>
申请公布号
DE4222140(C2)
申请公布日期
1994.06.16
申请号
DE19924222140
申请日期
1992.07.06
申请人
HEINZL, JOACHIM, PROF. DR.-ING., 80333 MUENCHEN
发明人
HEINZL, JOACHIM, PROF. DR.-ING., 8000 MUENCHEN;RUNGE, WOLFRAM, 8000 MUENCHEN
