| 摘要 |
In the micro vacuum device according to the present invention, an electron emitter is formed into a thin film form on a thin film heater rising in midair by means of air bridge, or a thin film heater is formed as an electron emitter (106), and the electron emitter is provided adjacent to a gate (104) with a space (109) therebetween so that field emission of electrons is easily effected, or the electron emitter (106) is heated so that thermoelectrons are easily emitted. <IMAGE> |
