METHOD OF FLAW DETECTION ON SILICON SURFACE,申请号SU19894684854-传众专利搜索

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发明名称	METHOD OF FLAW DETECTION ON SILICON SURFACE
摘要
申请公布号	RU1639341(C)	申请公布日期	1994.06.15
申请号	SU19894684854	申请日期	1989.02.28
申请人	NAUCHNO-ISSLEDOVATELSKIJ INSTITUT "PULSAR"	发明人	RUSAK T.F.;ENISHERLOVA-VELYASHEVA K.L.
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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