CLEANING EQUIPMENT

摘要

PURPOSE:To provide a cleaning equipment for removing dust particles adhered to a pellicle membrane efficiently without damaging the pellicle membrane. CONSTITUTION:A reticle 51 mounted on a carrying arm 21 is carried in through a carry-in port 12a of a housing 12 and held on a stage 15. The stage 15 then makes an angular displacement from horizontal state to vertical state and nitrogen gas (N2) is blown against the surface of the reticle 51 by means of an air shower 14. Dust particles adhered to a reticle membrane 52 set on the surface of the reticle 51 is removed by means of the nitrogen(N2) gas and discharged together with the nitrogen(N2) gas through a discharge port 13. This structure allows highly efficient removal of dusct particles adhered to the pellicle membrane 52 without damaging the pellicle membrane 52.