摘要 |
A method for cleaning an exhaust gas containing ammonia and at least one silicon-containing compound selected from the group consisting of silane and chlorosilanes, which comprises contacting the exhaust gas with a scavenger comprising a metal salt which forms tight complexes with ammonia. This ammine-forming metal salt may be immobilized on a porous solid support. Suitable ammine-forming metal salts include the sulfates, nitrates, chlorides, bromides, iodides, and hydroxides of copper, cobalt, iron, and nickel. Suitable supports include materials which are compatible with the gas mixtures being cleaned and the reaction products of the sorption process and which are stable under the conditions of use. Useful support materials include zeolites, aluminosilicates, alumina, silica, silica gel, kieselguhr, and activated carbon.
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