发明名称 FABRICATION OF SEMICONDUCTOR DEVICE AND POSITIONING EQUIPMENT THEREFOR
摘要 PURPOSE:To allow positioning of films of various colors by employing an infrared positioning light source in a positioning process of colored film containing such coloring matter as having absorption in visible region. CONSTITUTION:Since a coloring matter having absorption in visible region, e.g. red, blue, green, cyan, magenta, yellow, etc., has no absorption in infrared region, colored films having absorption in visible region can be registered by employing an infrared light source 2. For example, a halogen lamp, a xenon lamp, or an infrared laser emitting infrared rays 1 is employed as the light source 2. This constitution allows positioning of colored films employing various color resists without requiring complicated process where coating through dyeing method, lithography, and dyeing steps are repeated.
申请公布号 JPH06168868(A) 申请公布日期 1994.06.14
申请号 JP19920343273 申请日期 1992.11.30
申请人 SONY CORP 发明人 NATORI HIROTOMO;OTSUKA YOICHI
分类号 G03F9/00;H01L21/027;H01L21/30;(IPC1-7):H01L21/027 主分类号 G03F9/00
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