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发明名称
VERTICAL REACTOR
摘要
申请公布号
JPH06168904(A)
申请公布日期
1994.06.14
申请号
JP19920341711
申请日期
1992.11.27
申请人
KOKUSAI ELECTRIC CO LTD
发明人
HOSAKA EIJI;YOSHIDA HISASHI;IKEDA KAZUTO;KOIKE HIDEKI;KANO RIICHI
分类号
H01L21/205;H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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