| 摘要 |
<p>PURPOSE: To obtain the high sensitivity and low linearity without increasing the additional cost or complexity by suitably selecting the thickness of the diaphragm of a converter and the separate distance between a clamped diaphragm and a fixed capacitor. CONSTITUTION: A silicon wafer 10 sandwiched between glass boards 12 and 14 has the desired thickness of a silicon diaphragm 24. A step recess for partitioning a gap 22 is formed between the diaphragm 24 and a capacitor plate 16 formed at the boards 12, 14. A differential capacitance of the capacitance C1 between the diaphragm 24 and the plate 16 and the capacitance C2 between the diaphragm 24 and the plate is generated by the movement of the diaphragm 24. The nonlinearity can be introduced to a converter in a range for canceling the intrinsic nonlinearity of the opposite direction by excess capacitance by regulating the thickness of the diaphragm 24.</p> |
