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发明名称
摘要
申请公布号	JPH0645339(U)	申请公布日期	1994.06.14
申请号	JP19920087718U	申请日期	1992.11.27
申请人		发明人
分类号	H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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