| 摘要 |
<p>PURPOSE:To provide an electrostatic chucking device and an electrostatic chucking method capable of stable chucking. CONSTITUTION:In the case of the electrostatic chucking method, low voltage is applied before a sample 7 touches the sample supporting table 1 of an electrostatic chucking device, and high voltage is applied when it touches the sample supporting table 1. The electrostatic chucking device has a sample supporting table 1 having an insulated surface and a buried electrode 3, a conductive supporting rod 8 made so as to be able to change its height against the sample supporting table 1 and touch the sample supporting table 1 by lowering it after putting the sample 7 on, a power source 6 for applying potential to the electrode 3, a current detecting means 13 for detecting current flowing in the supporting rod 8, and a control means 14 for detecting the current change of the current detecting means 13 and controlling the potential of the power source.</p> |
