发明名称 Scanning force microscope
摘要 The scanning force microscope is an improved free standing type scanning force microscope with integrated scanning drivers for examination of a wide range of sizes and weights of stationary specimens, with the capability of scanning a sample in contact with a fluid. The scanning force microscope also includes motorized driver legs for operating the approach of the optical lever arm and sensor head to the sample, to allow for automation of the approach of the sensor head to the specimen.
申请公布号 US5319960(A) 申请公布日期 1994.06.14
申请号 US19920847160 申请日期 1992.03.06
申请人 TOPOMETRIX 发明人 GAMBLE, RONALD C.;WEST, PAUL E.
分类号 G01B21/30;G01B7/34;G01Q10/00;G01Q20/02;G01Q30/08;G01Q30/14;G01Q70/02;H01J37/28;(IPC1-7):G01B5/28 主分类号 G01B21/30
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