| 发明名称 |
Probe apparatus for probing an object held above the probe card |
| 摘要 |
A probe apparatus having a probe card having plurality of probes, a member arranged above the probe card to hold an object to be probed, and a test head electrically connected to the probes of the probe card.
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| 申请公布号 |
US5321453(A) |
申请公布日期 |
1994.06.14 |
| 申请号 |
US19920923539 |
申请日期 |
1992.08.03 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MORI, SHIGEOKI;KARASAWA, WATARU |
| 分类号 |
G01R1/073;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/073 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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