发明名称 Fabrication of ferrite films using laser deposition
摘要 A method is provided for fabricating a thin film of ferrite material upon a variety of substrates wherein pulsed high power laser light impinges upon a target of ferrite material causing localized vaporization of the ferrite material and subsequent deposition upon a proximate substrate. The rapidity with which the target material is vaporized promotes chemical stability during ferrite film growth. Both the target and the substrate are maintained inside a vacuum chamber, and are maintained substantially within a temperature range of 550 DEG -900 DEG C. The equipment needed to practice the method is relatively inexpensive. Furthermore, the method allows for the large-scale production of high quality ferrite films with preferential magnetic texture, wherein the magnetization of the ferrite material aligns in a preferred direction in the plane of the film.
申请公布号 US5320881(A) 申请公布日期 1994.06.14
申请号 US19920924734 申请日期 1992.08.04
申请人 NORTHEASTERN UNIVERSITY 发明人 VITTORIA, CARMINE
分类号 C23C14/08;C23C14/28;(IPC1-7):B05D3/06;B05D5/12 主分类号 C23C14/08
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