发明名称 Measuring method and measuring apparatus
摘要 A measuring arrangement includes forming first and second pairs of light beams each having a low frequency light beam and a high frequency light beam. Both pairs of light beams generate beat signals of the same frequency. The low frequency light beam of either pair and the high frequency of the other pair pass through a predetermined optical path to cause phase changes in the same direction. Beat signals are generated by superposing the first and second beam pair to provide measurement information on the phase changes.
申请公布号 US5321502(A) 申请公布日期 1994.06.14
申请号 US19920910457 申请日期 1992.07.08
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUMOTO, TAKAHIRO;YOSHII, MINORU;SAITO, KENJI;NOSE, HIROYASU;SENTOKU, KOICHI;TAKEUCHI, SEIJI
分类号 G01B9/02;G03F9/00;(IPC1-7):G01B9/02 主分类号 G01B9/02
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