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发明名称
METHOD AND SYSTEM FOR DEPOSITING DIELECTRIC THIN FILM
摘要
申请公布号
JPH06168878(A)
申请公布日期
1994.06.14
申请号
JP19920321573
申请日期
1992.12.01
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HAYASHI SHIGENORI;KOMAKI KAZUKI;KAMATA TAKESHI;KITAGAWA MASATOSHI;DEGUCHI TAKASHI;TAKAYAMA RYOICHI;HIRAO TAKASHI
分类号
H01L21/205;C23C14/08;C23C14/34;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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