METHOD AND DEVICE FOR FORMATION OF THIN FILM,申请号JP19920306781-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FORMATION OF THIN FILM
摘要
申请公布号	JPH06163422(A)	申请公布日期	1994.06.10
申请号	JP19920306781	申请日期	1992.11.17
申请人	ANELVA CORP	发明人	FUKAGAWA WATARU
分类号	C23C14/54;C30B25/12;C30B25/14;H01L21/205;H01L21/31;(IPC1-7):H01L21/205	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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