| 摘要 |
PURPOSE:To stably operate a laser by a method wherein the spectral width of an output laser beam in a laser apparatus is controlled to a definite value. CONSTITUTION:The spectral width DELTAlambda of a laser beam which has been discharged and excited in a laser chamber 4 is detected by a spectral-width monitor 7, and a controller 1 controls, via a subtank 15 and opening and shutting valves 16, 17, the supply amount of a gas supplied to the laser chamber 4 from an F2 bomb 8 in such a way that a spectral width becomes definite on the basis of the detected spectral width DELTAlambda. |
