SYSTEM FOR WET AUTOMATIC WASHING OF WAFER,申请号JP19920313823-传众专利搜索

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发明名称	SYSTEM FOR WET AUTOMATIC WASHING OF WAFER
摘要
申请公布号	JPH06163492(A)	申请公布日期	1994.06.10
申请号	JP19920313823	申请日期	1992.11.25
申请人	FUJI ELECTRIC CO LTD	发明人	OOE CHIKAHIRO
分类号	H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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