ELECTRON BEAM MEASUREMENT APPARATUS

摘要

PURPOSE:To obtain an electron beam measurement apparatus which can be assembled easily and has good efficiency by disposing a scattered electrons collection net made of a metal plate having plurality of through holes formed in a mesh pattern in front of a collision cup of an electron beam. CONSTITUTION:An accelerated electron beam 1 is made to collide with a metal- made electron beam collision cup 2 and the most amount of absorbed electrons are forced to flow into a level meter 10 through an electric wire 9a. Scattered electrons 3 reflected inside the electron beam collision cup 2 are collected by a scattered electron collection net part 4A and forced to flow into the level meter 10 through an electric wire 9b. In the abovementioned electron beam measurement apparatus, the scattered electron collection net part 4A is formed of a metal plate 11 having a plurality of through holes formed in a mesh pattern. It is preferable that the through holes are square shape and a collection pattern is provided in the hole in diagonal shape. The through holes of the mesh pattern can be formed by chemically etching a thin metal film.