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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH06163680(A)
申请公布日期
1994.06.10
申请号
JP19920313629
申请日期
1992.11.24
申请人
NIPPON STEEL CORP
发明人
HASHIGUCHI GEN
分类号
H01L21/762;H01L21/76;H01L27/12;(IPC1-7):H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
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