发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE |
摘要 |
PURPOSE:To obtain the manufacturing method of a semiconductor device wherein oligomers which inevitably precipitate on the substrate surface when a semiconductor device is formed on an organic resin film substrate are not generated. CONSTITUTION:The surface of an organic resin film substrate 10 is previously coated with acrylic resin 11. Thereby generation of precipitate which has been inevitably generated during the conventional manufacturing process of a semiconductor device is prevented, and the quality and the productivity of a semiconductor device are improved. |
申请公布号 |
JPH06163958(A) |
申请公布日期 |
1994.06.10 |
申请号 |
JP19920072491 |
申请日期 |
1992.02.21 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
TAKENOUCHI AKEMI;HOSOKAWA MAKOTO;ARAI YASUYUKI;NAKAJIMA SETSUO |
分类号 |
H01L31/04;H01L23/14;H01L23/498;H01L31/0392;H01L31/075 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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