发明名称 ELECTRON EMISSION ELEMENT, AND ELECTRON EMISSION DEVICE, DISPLAY, AND ELECTRON BEAM DRAWING DEVICE USING SAME
摘要 <p>PURPOSE:To give a sufficient motion energy to electrons, improve the efficiency of emitting electrons from an electron emission element, and form plural electron emission elements in the same substrate. CONSTITUTION:In an electron emission device comprising an emitter layer 102, a first and a second base layers 103, 104, a collector layer 105 having an electron emission surface, and a means to apply an inverse bias voltage between the base layers 103, 104 and the collector layer 105, the emitter layer 102 and the first base layer 103 have first band gaps respectively, the second base layer 104 has a second band gap, and a hetero junction is formed by the first and the second base layers 103, 104.</p>
申请公布号 JPH06162917(A) 申请公布日期 1994.06.10
申请号 JP19910078679 申请日期 1991.02.15
申请人 CANON INC 发明人 TSUKAMOTO TAKEO;WATANABE NOBUO;OKUNUKI MASAHIKO
分类号 G03F7/20;G21K5/04;H01J1/30;H01J1/308;H01J21/06;H01J29/04;H01J31/12;H01J37/073;H01J37/305;(IPC1-7):H01J1/30 主分类号 G03F7/20
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