CLEANING DEVICE FOR BONDING TOOL,申请号JP19920313095-传众专利搜索

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发明名称	CLEANING DEVICE FOR BONDING TOOL
摘要
申请公布号	JPH06163635(A)	申请公布日期	1994.06.10
申请号	JP19920313095	申请日期	1992.11.24
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	HIGUCHI MOTOHIRO;ONO KOKI;TANI SEIDO;HARAZONO KOHEI;BESSHO YOSHIO
分类号	H01L21/60;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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