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发明名称
WIRING STRUCTURE OF SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH06163545(A)
申请公布日期
1994.06.10
申请号
JP19920335605
申请日期
1992.11.20
申请人
NIPPON STEEL CORP
发明人
ITAKUSU MOTOKUNI
分类号
H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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