| 摘要 |
PURPOSE:To provide a compact substrate carrier device which enables installation to be contained inside a breadth of an exposure device. CONSTITUTION:The title device is provided with a carrier arm 9 whereto a chuck part 10 is attached on one end side, a first double acting cylinder 11 for rotating and moving the carrier arm 9 in a plane approximately parallel with a chuck surface 3a of a longitudinal table 3 and a second double acting cylinder 12 for rotating and driving the carrier arm 9 around its axis. They are contained within the width of an exposure device 4 under the longitudinal table 2 of the exposure device 4. A third double acting cylinder 15 of linearly moving the carrier arm 9 perpendicularly to the chuck surface 3a of the longitudinal table 3, a stage 17 which moves freely on a uniaxial stage 16 installed parallel with the exposure light beam A, positioning pins 18, 19, 23 for positioning a substrate 2 mounted on a chuck surface 17a of the stage 17 and a pressing arm 21 are installed in the device. |
