发明名称 LASER-GAS TRANSFER APPARATUS
摘要 PURPOSE:To prevent that impurities such as lubricant mists, metal powders or the like are mixed with a laser-oscillating gas which is circulated in a laser- gas circulation passage. CONSTITUTION:A laser-gas transfer apparatus U is provided with a gas- circulating blower 9 arranged in a laser-gas circulation passage 8 which circulates a laser-oscillating gas to a laser oscillating tube. A blower rotary shaft 14 which is connected integrally to the gas-circulating blower 9 is supported by a journal-gas bearing 27 and a thrust-gas bearing 28. A laser- oscillating gas whose pressure is higher than the laser-oscillating gas in the laser-gas circulation passage 8 is supplied to the bearings 27, 28 by a bearing-gas supply device U1.
申请公布号 JPH06164025(A) 申请公布日期 1994.06.10
申请号 JP19920313709 申请日期 1992.11.24
申请人 SHIMADZU CORP 发明人 ISAKA HIROSHI
分类号 H01S3/036;(IPC1-7):H01S3/036 主分类号 H01S3/036
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