| 摘要 |
PURPOSE:To provide a ceramic heater wherein good equality can be attained while a quick temperature rise can be performed of a heated unit. CONSTITUTION:A ceramics heater is formed by burying a resistance heating unit 2 in a ceramic base unit 1, to heat a heated unit by mounting it. The heater is constituted of a resistance heating means for heating the heater itself and the heated unit by flowing a current in the resistance heating unit 2 and an eddy current generating means for heating the heated unit by generating an eddy current in the heated unit. |
