| 摘要 |
PURPOSE:To form a plurality of transparent conductive oxide films which are electrically isolated, without generating burrs on the side wall of the transparent conductive oxide film, and damaging a film positioned below the transparent conductive oxide film. CONSTITUTION:The forming method of a plurality of transparent conductive oxide films 2a, 2b, 2c which are electrically isolated, consists of a process for forming a transparent conductive oxide film 2, and a process for exposing isolation parts 2ab, 2bc of the transparent conductive oxide film 2 to hydrogen plasma, and increasing the resistance of the film. |
