| 摘要 |
<p>PURPOSE:To provide a multilayer interconnection board, in which a high-speed super conducting element like Josephson device can function effectively for an electric signal transferred in a circuit wiring at high speed. CONSTITUTION:In a multilayer interconnection board, an insulating film 2 made of high polymer material and a circuit wiring film 3 are alternately laminated on a base insulating board. Then, each circuit wiring film 3 on upper and lower sides are electrically connected through a through in the insulating film 2. The circuit wiring film 3 has a two-layer structure made of niobium 3a and niobium nitride 3b or a three-layer structure made of niobium nitride 3b, niobium 3a, and niobium nitride 3b.</p> |
