| 摘要 |
PURPOSE: To obtain a programmable contact via structure and a fabrication method thereof in which an amorphous silicon butter layer is not damaged during fabrication period by providing the amorphous silicon butter layer on a part of a patterned first insulation layer while covering an opening. CONSTITUTION: A butter layer 22 serves as a conductor and a contact, i.e., a joint, is formed between a fourth conductive layer 28 and a first conductive layer 12. Consequently, the contact functions as an antifuse. A contact via 18 is open-circuited until programming or writing is performed by applying a voltage. After programming or writing is performed, the contact via 18 is close-circuited to allow current flow between the conductive layers. This arrangement realizes a contact programmable with higher reliability as compared with a conventional one without complicating the process significantly. |
