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发明名称
SILICON WAFER
摘要
申请公布号
JPH06163557(A)
申请公布日期
1994.06.10
申请号
JP19920318441
申请日期
1992.11.27
申请人
TOSHIBA CERAMICS CO LTD
发明人
KIRINO YOSHIO;YOSHIKAWA ATSUSHI
分类号
H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
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