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发明名称
Halbleiterspeichereinrichtung und Herstellungsverfahren hierfür
摘要
申请公布号
DE4109299(C2)
申请公布日期
1994.06.09
申请号
DE19914109299
申请日期
1991.03.21
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
KIMURA, MIKIHIRO, ITAMI, HYOGO
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L27/108;G11C11/401;H01L21/72
主分类号
H01L27/04
代理机构
代理人
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地址
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