SURFACE INSPECTION AND CHARACTERIZATION SYSTEM AND PROCESS

摘要

A system and process for obtaining near real time, non-destructive inspection and characterization of surfaces. The system (10) includes an infrared light source (14) which is directed on a surface (18) to be inspected. A portion of the reflected light (54) is gathered and directed through an optical filter arrangement (26, 28) which separates the light into a plurality of sets of weavelengths which correspond to particular physical properties of the thin film, such as absorbance. The intensity of each set of wavelengths is detected by optical detectors (32, 34, 36) and the reslulting signals analyzed to characterize the surface.