Optical measuring device for determination of transport rate of micro structures - uses detected reflected light from measuring points offset along surface of microstructure element in transport direction

摘要

The speed measuring device uses at least one light source (1) providing a beam (4) directed onto the transparent carrier (10) having a diffractive optical imaging element (7) on the side facing the microstructure element. The incident light beams (5, 5') are focussed on the measuring points (3, 3') offset in the transport direction. The reflected light is received by the optical sensor (9) on the opposite side of the carrier to the imaging element. Pref. a further diffractive optical imaging element (8) is provided on the side of the carrier facing the light source. The diffractive optical element is a holographic foil. USE/ADVANTAGE - Preparation of measurement signals. Compact, low-cost miniature optical system.