Chamber and chamber combination for transfer of at least one component - with a component holding element swivelled through a chamber opening

摘要

The chamber (1) for a vacuum installation has at least one opening (13x) for transfer of components (40) in the course of their processing, and a driven transport unit (7) for at least one component. The transport unit carries at least one transport mechanism with a holder in element (19) which - in a plane perpendicular to the plane of the opening (13x) - is swivelable in such a way that it (having been brought into the region of the opening by the transport unit (7)) completely passes through the opening. The chamber combination is characterised by the presence of another chamber (3) with a transport unit (43) with an axis of rotation parallel to the swivel axis (26) of the transport mechanism of the unit (7). components are transported on fixed circular paths, with radial transfer motion relative to these paths through an opening. USE/ADVANTAGE - Used in vacuum processing installations for disk-shaped data storage elements (compact, magnetic, magnetic-optic, etc. disks). Equipment costs (in comparison with those of known chambers/chamber combinations) are substantially reduced.