| 摘要 |
A vertical boat for holding a plurality of semiconductor wafers comprises two end members at the top and the bottom of the vertical boat, and a plurality of support members (3, 4) vertically mounted on the end members, including two front support members (3) located on the wafer inserting side and at least one rear support member (4) located on the rear side of the boat, each support member (3, 4) having slits (3a, 4a) formed thereon and support portions defined by the slits (3a, 4a) for supporting semiconductor wafers (1), wherein each front support member (3) is a circular arc plate, and each angle (A, B) between the wafer inserting direction (X) and a line linking the front end (3b) of the support portion of a front support member (3) to the center (1a) of the wafer (1) is 100 degrees or more. <IMAGE>
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