摘要 |
<p>A robot apparatus comprises a robot vacuum chamber (1003) having an outer wall (1004), a top wall (1001) and a bottom wall (1002); a robot (1008) within said vacuum chamber (1003); and a support (1005, 1006, 1007) within said vacuum chamber (1003) extending from the top wall (1001) to the bottom wall (1002), whereby when a vacuum is produced within said vacuum chamber (1003), said support (1005, 1006, 1007) significantly reduces vertical displacement of said top and bottom walls (1001, 1002) by ambient pressure. <IMAGE></p> |