发明名称 Robot apparatus.
摘要 <p>A robot apparatus comprises a robot vacuum chamber (1003) having an outer wall (1004), a top wall (1001) and a bottom wall (1002); a robot (1008) within said vacuum chamber (1003); and a support (1005, 1006, 1007) within said vacuum chamber (1003) extending from the top wall (1001) to the bottom wall (1002), whereby when a vacuum is produced within said vacuum chamber (1003), said support (1005, 1006, 1007) significantly reduces vertical displacement of said top and bottom walls (1001, 1002) by ambient pressure. &lt;IMAGE&gt;</p>
申请公布号 EP0600851(A2) 申请公布日期 1994.06.08
申请号 EP19940101717 申请日期 1990.10.10
申请人 APPLIED MATERIALS, INC. 发明人 LOWRANCE, ROBERT B.
分类号 B25J9/06;B25J9/10;B25J9/12;B25J19/00;B25J21/00;F16H49/00;F16D7/02;H01L21/00;H01L21/673;H01L21/677;(IPC1-7):B25J21/00 主分类号 B25J9/06
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