| 发明名称 |
Diffusion furnace boat assembly and wafer support. |
| 摘要 |
Described is a vertical rack or boat assembly for supporting and carrying semi-conductor material wafers in a vertical diffusion furnace, the assembly being made up of a rack or boat (1) and wafer support rings (5) which fit into the boat (1). <IMAGE> |
| 申请公布号 |
EP0600516(A1) |
申请公布日期 |
1994.06.08 |
| 申请号 |
EP19930119553 |
申请日期 |
1993.12.03 |
| 申请人 |
SAINT GOBAIN/NORTON INDUSTRIAL CERAMICS CORPORATION |
发明人 |
PROIA, STEPHEN E.;FOSTER, BRYAN D. |
| 分类号 |
H01L21/22;C23C16/458 |
主分类号 |
H01L21/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
