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发明名称
Method of forming electrode pattern.
摘要
申请公布号
EP0476856(B1)
申请公布日期
1994.06.08
申请号
EP19910307816
申请日期
1991.08.27
申请人
IDEMITSU KOSAN COMPANY LIMITED
发明人
YUASA, KIMIHIRO;HASHIMOTO, KENJI
分类号
B23H9/06;C23F1/18;C23F4/00;G02F1/1343;H01L31/18;H05K3/08;(IPC1-7):G02F1/134;H05K3/00;C23F1/00;H01L21/28
主分类号
B23H9/06
代理机构
代理人
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地址
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