发明名称 NON-CONTACT MEASURING DEVICE
摘要 PURPOSE:To provide the non-contact measuring device capable of enhancing the measuring accuracy of a work by correcting the difference of reflectivity between the respective mirrors of a polygon mirror. CONSTITUTION:The offset voltage corresponding to the reflectivities of the respective mirrors of a polygon mirror 18 outputted by an offset voltage forming means constituted of a peak hold circuit 34 are subtracted (offset) from the voltage signal outputted from the measuring part 10 of a work 28 by an operational amplifier 38. This offset voltage signal is converted to a binary signal through zero cross comparison by a comparator 40. By this constitution, the voltage signals different in level outputted from the measuring part 10 can be converted to binary signals of the same level and, therefore, the difference of reflectivity between the respective mirrors of the polygon mirror can be corrected.
申请公布号 JPH06160027(A) 申请公布日期 1994.06.07
申请号 JP19920155109 申请日期 1992.06.15
申请人 TOKYO SEIMITSU CO LTD 发明人 SAKAO HIROAKI
分类号 G01B11/02;G02B26/10;G02B26/12;(IPC1-7):G01B11/02 主分类号 G01B11/02
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