发明名称 Transistor having a lightly doped region
摘要 A transistor (10 or 11) and method of formation. The transistor (10) has a substrate (12). The substrate (12) has an overlying dielectric layer (14) and an insulated conductive control electrode (16) which overlies the dielectric layer (14). A dielectric region (18) overlies the insulated conductive control electrode (16), and a dielectric region (20) is adjacent to the insulated conductive control electrode (16). A spacer (30) is adjacent to the dielectric region (20). Epitaxial regions (24) are adjacent to the spacer (30) and the spacer (30) is overlying portions of the epitaxial regions (24). A dielectric region (26) overlies the epitaxial regions (24). Highly doped source and drain regions (32) underlie the epitaxial regions (24). LDD regions (28), which are underlying the spacer (30), are adjacent to and electrically connected to the source and drain regions (32).
申请公布号 US5319232(A) 申请公布日期 1994.06.07
申请号 US19930076488 申请日期 1993.06.14
申请人 MOTOROLA, INC. 发明人 PFIESTER, JAMES R.
分类号 H01L21/225;H01L21/331;H01L21/336;H01L21/8238;H01L29/78;(IPC1-7):H01L29/78;H01L29/72;H01L29/10 主分类号 H01L21/225
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