| 摘要 |
PURPOSE:To enable stably and surely inspection of the existence of parts and solder and position deviation. CONSTITUTION:The reflection light from a substrate 21 and parts 22 is focused on photoelectric conversion elements 25, 26 and 27 for each signal of R, G, B through an optical system 24 for imaging and analog proportional to incident light intensity is output. These analog signals are non-linearly converted with logarithmic amplifiers 28, 32, 35 for each of R, G, B signals, and the small parts of signal are extended. The extended signal are converted with A/D conversion circuit 29, 33, 36 for each of RGB signals, shading correction circuits 30, 34, 37 for each of RGB signals and an RGB-TIQ conversion circuit 31 and are writen on image memories 38, 39, 40 for each YIQ signal. Finally with a one chip microcomputer 41 for calculating the content of the image memories 38, 39, 40 of the YIQ signals, the color difference of the substrate, electronic parts and cream solder are distiguished with good resolution and thus, the existence of the parts and solder and position deviation stably inspected. |
