| 摘要 |
PURPOSE:To provide a capacitive acceleration detector which is improved in temperature characteristic, accuracy, and reliability and is sufficiently fit for use in a severe environment, such as the automobile, etc. CONSTITUTION:The title detector is manufactured by sticking and fixing a sensor chip 1 for detecting acceleration to a circuit board 20 with adhesive layers 16 and 17 between which a spacer 21 is put. Since the spacer 21 absorbs the deformation of the board 21 even when the board 20 warps due to a temperature change, the chip 1 receives no influence from the deformation of the board 20 and the characteristics of the chip 1 do not change. Therefore, a highly reliable capacitive acceleration detector can be obtained. |
